Medium sized vacuum plasma equipment（PM180L ， PM216L）

1

Machine specifications

PM180L：1400(W) ×1720(H)×1050(D)mm

PM216L：1450(W) ×1720(H)×1150(D)mm

2

Vacuum chamber specifications

PM180L：Imported aluminum 550(W)×680(H)×500(D)mm

PM216L：Imported aluminum 600(W)×600(H)×600(D)mm

3

Electrode plate specifications

PM180L：10 layer flat electrode（530(L)×400(W)mm）Can customized

PM216L：10 layer flat electrode（560(W)×500(D)mm）Can customized

4

control system

Touch screen + PLC control

5

Vacuum measurement system

Pirani resistance vacuum gauge

6

Gas metering system

Accurate mass flow controllersMFC

7

Number of gas pathways

2-way intake, 1-way exhaust

8

Plasma Generator

5KWPlasma generation source，40KHz（selectable 13.56MHz）

9

working gas

2 working gases are optional：Ar2、N2、H2、O2

Features

High precision, fast response, good handling and compatibility, perfect functions and professional technical support.

Industry

Suitable for camera and industry, mobile phone manufacturing, semiconductor IC field, silicone, plastic, polymer field, automotive electronics industry, aviation industry, etc.

Application

1. Camera and fingerprint recognition industry: deoxidation of the gold PAD surface of rigid-flex boards; IR surface cleaning and cleaning;

2. Semiconductor IC field: COB, COG, COF, ACF process, used for wire bonding, cleaning before soldering;

3. Silicone, plastic, polymer field: silica gel, plastic, polymer surface roughening, etching, activation.